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Applications CMP processes in semiconductor front-end, back-end, packaging and so on. *Examples of polishing materials: Silicon-based materials (poly-Si, SiO2, SiN), metals, resin Features Design and manufacturing of abrasive particles Accumulated technology of polishing materials for glasses Design and manufacturing of various analyses and chemical liquid Polishing material evaluation technology CMP Process Polished 8-inch Wafer (A highly planarized multilayer structure can be achieved) Chemical Mechanical Polishing Chemical Mechanical Polishing, or CMP, has quickly become an indispensable technique for fabricating integrated circuits. During the CMP process, a wafer surface is polished for planarization using a slurry and a polishing pad. The abrasive particles in the slurry grind against the sample surface, loosening material. The chemicals in the slurry then etch and dissolve the material. This process is designed to remove areas of elevated topography more quickly than the lower areas. Although mechanical grinding alone can achieve a reasonable degree of planarization, chemical etching is necessary to remove the extensive damage from mechanical grinding. Although chemical etching results in a damage-free sample, the process is typically isotropic and does not remove topographical features. Ceria slurry for STI/ILD Applications CES-300 Series/330F Series ・Slurry for STI Applications ・Slurry for ILD Applications For the application of silica insulation film, we provide high-function ceria slurry which excels in step flattening property, material selectivity, uniformity, and has less frequency of defects, as a raw material solution including polishing conditions. Additionally, it is able to support a supply method of both one liquid and two liquids. Sales Offices Production Base Japan: Corporate headquarters Taiwan：AGC Electronics Taiwan Co., Ltd. China：AGC Chemicals Trading (Shanghai) Co., Ltd. ASEAN：AGC Asia Pacific Pte., Ltd. Europe and America：AGC Electronics America Product Inquiries & Information Requests Inquiry Form AGC Seimi Chemical Co., Ltd. Seimi Chemical Co., Ltd. (“Seimi”) is a wholly-owned subsidiary of AGC Asahi Glass. Advanced technology platforms in organic and inorganic materials are Seimi's core assets. Seimi produces some of world's most leading-edge chemicals for the electronics, optics and pharmaceutical industries. Seimi's state-of-the-art quality control systems ensure the highest quality materials available in today's market. 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